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AcuCurve 100 - Curvature and
stress measurement solution AcuCurve 100 is a highly sensitive surface curvature measurement system. It is capable of measuring surface with radius of curvature greater than 12km. Our proprietary measurement technique enables two dimensional curvature measurement with high accuracy and precision. |
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CT 200Total thickness variation (TTV) & double-side topography measurement solution
CT 200 is an innovative TTV measurement system that provides high accuracy measurement on substrates with rough or polished surfaces. Capable of handling substrate of 300mm (optional to 600mm), CT200 offers the measurement precision of 0.2 microns while not being affected by stage vertical travel errors.
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Acu-i
1000
Acu-i 1000 is a full wafer imaging spectrometer system. It is capable of acquiring spectra of more than 10,000 measurement spots on a sample surface within 5 seconds. Innovative algorithms and software enable high-speed determination of thickness map across the entire wafer/sample.
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| Other Introductory Products | ||
| Thin Film Metrology - Spectrometer and Spectroscopic Ellipsometers For more information visit the SVT Associates website |
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Customized and Combo Systems
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Copyright © 2006 Lichtech, INC. All rights reserved. 4633 Old Ironside Drive, Santa Clara, CA 95054 USA phone: 952-934-0666 Fax: 952-934-2737 Email: sales@lichtech.com |